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Mechanically corner-coupled square microresonator array for reduced series motional resistance

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3 Author(s)
Demirci, M.U. ; Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA ; Abdelmoneum, M.A. ; Nguyen, C.T.-C.

Substantial reductions in vibrating micromechanical resonator series motional resistance R/sub x/ have been attained by mechanically coupling and exciting a parallel array of corner-coupled polysilicon square plate resonators. Using this technique with five resonators, an effective R/sub x/ of 4.4 k/spl Omega/ has been attained at 64 MHz, which is more than 4.8 X smaller than the 21.3 k/spl Omega/ exhibited by a stand-alone transverse-mode square resonator, and all this achieved while still maintaining an effective Q>9,000. This method for R/sub x/-reduction is superior to methods based on brute force scaling of electrode-to-resonator gaps or DC-bias increases, because it allows a reduction in R/sub x/ without sacrificing linearity, and thereby breaks the R/sub x/ versus dynamic range trade-off often seen when scaling.

Published in:

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003  (Volume:2 )

Date of Conference:

8-12 June 2003