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RF MEMS reliability

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2 Author(s)
DeNatale, J. ; Rockwell Sci. Co., Thousand Oaks, CA, USA ; Mihailovich, R.

Device reliability is a key factor in the ultimate insertion of RF MEMS devices into operational systems. In particular, cycle lifetimes of contacting devices such as RF switches can be technically challenging due to the requirement of good contact electrical performance under operational stresses. This paper presents a general discussion of the reliability limiting mechanisms that can impact RF MEMS devices, with an emphasis on the issues relevant to RF switch cycling lifetimes.

Published in:

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003  (Volume:2 )

Date of Conference:

8-12 June 2003