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Design and experiments of bio-mimicry sound source localization sensor with gimbal-supported circular diaphragm

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3 Author(s)
N. Ono ; Dept. of Inf. Phys. & Technol., Tokyo Univ., Japan ; A. Saito ; S. Ando

We propose a novel structure for sound source localization by mimicking an auditory organ of a parasitoid fly. It is based on lateral gradients of sound pressure from a non-frontal source. The gimbal-supported circular diaphragm is very suitable for detecting the small gradients and miniaturizing into a micro sensor. We describe the design method and FEM analysis of the diaphragm structure. We show fabrication of two types of sensors, a scaled-up type and a surface-micromachined type, and the experimental results.

Published in:

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003  (Volume:1 )

Date of Conference:

8-12 June 2003