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Highly space-efficient electrostatic zigzag transmissive micro-optic switches for an integrated MEMS optical display system

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4 Author(s)
Wang, K. ; Washington Univ., Seattle, WA, USA ; Bohringer, K.F. ; Sinclair, M. ; Starkweather, G.

This paper presents likely the world's smallest electrostatic visible light highly space-efficient transmissive micro-optical switches (TMOS) for an integrated MEMS optical display system. Each TMOS represents one pixel with 150 /spl mu/m/spl times/150 /spl mu/m spacing in a display module. It is demonstrated that a zigzag electrostatic actuator of 47 /spl mu/m/spl times/160 /spl mu/m size can achieve a maximum static lateral displacement of 10 /spl mu/m at 38 V. Depending on the zigzag actuator design, these devices have a mechanical resonance frequency of up to 18.6 kHz.

Published in:

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003  (Volume:1 )

Date of Conference:

8-12 June 2003