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An integrated, vertical-drive, in-plane-sense microgyroscope

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6 Author(s)
Bhave, S.A. ; Berkeley Sensor & Actuator Center, Univ. of California, Berkeley, USA ; Seeger, J.I. ; Xuesong Jiang ; Boser, B.E.
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This paper describes the principle of operation and experimental results of a Y-axis /spl Sigma//spl Delta/ force-feedback gyroscope. The gyroscope was fabricated in Analog Devices' monolithic Modular-MEMS process with 6/spl mu/m thick structural polysilicon and 0.8/spl mu/m CMOS. The sensor utilizes vertical (Z-axis) actuation of the proof mass to enable in-plane (X-axis) differential sensing of the Coriolis force. Two orthogonally-oriented gyroscopes form a dual-axis rate sensor. The gyroscope achieves 8/spl deg//sec//spl radic/Hz noise floor, for operation at ambient pressure.

Published in:

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003  (Volume:1 )

Date of Conference:

8-12 June 2003