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Evaluation of carbon nanotubes as gas sensing materials in micro gas sensors

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6 Author(s)
Moon, S.I. ; Microsyst. Res. Center, Korea Inst. of Sci. & Technol., Seoul, South Korea ; Lee, D.J. ; Jang, Y.T. ; Kim, S.W.
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We fabricated the gas sensor using carbon nanotubes (CNTs) and investigated the detection properties for NH/sub 3/ gas. The sensing material of gas sensor is employed multi-wall carbon nanotubes (MWNTs). The CNT gas sensor structure is realized with technologies of micro-electro mechanical systems (MEMS). The nanotubes gas sensor is operated at room temperature. And the electrical resistance of the carbon nanotubes is measured upon exposure to NH/sub 3/ gases. Also, recovery time of CNT gas sensor is measured according to temperature.

Published in:

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003  (Volume:1 )

Date of Conference:

8-12 June 2003