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Thick-film PZT-metallic triple beam resonator

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6 Author(s)
Yan, T. ; Brunel Centre for Manuf. Metrol., Brunel Univ., Uxbridge, UK ; Jones, B.E. ; Rakowski, R.T. ; Tudor, M.J.
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A metallic triple-beam resonator with thick-film piezoelectric elements to drive and detect vibrations is presented. The resonator substrate was fabricated by a double-sided photochemical-etching technique and the thick-film piezoelectric elements were deposited by a standard screen-printing process. The resonator, 15.5 mm long and 7 mm wide, has a favoured mode at 6.2 kHz with a Q-factor of 3100.

Published in:

Electronics Letters  (Volume:39 ,  Issue: 13 )