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We have investigated the crystallinity and surface morphology of main YBCO films and buffer layers deposited on an MgO substrate by a low temperature buffer layer deposition technique. A significant improvement in the crystalline quality of the YBCO film is achieved when an amorphous buffer layer of 100 [nm] in thickness on bare MgO substrate annealed at 930[°C] is crystallized by annealing temperature 950[°C] for 1 hour in an air atmosphere. The surface of main YBCO films has pyramid like large grains when YBCO films have good crystallinity. We confirmed that YBCO films grown on a well-crystallized buffer layer had better crystallinity than ones grown on bare MgO substrate.