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Employing an anodization method into our fabrication process, we have successfully fabricated STJs with size of 4 μm in diameter, Josephson critical current density of 1000 A/cm2, low leakage current of less than 10 pA at 0.3 K and high fabrication yield of more than 90 percent. These STJs were applied to fabricate submillimeter-wave direct detectors using 12 linearly distributed junctions, each circular junction having a current density of 600 A/cm2 and size of 4 μm in diameter. Direct detection of submillimeter-waves was measured using a Fourier transform spectrometer, which shows a maximum sensitivity at 440 GHz and a fractional bandwidth of 10 percent.
Date of Publication: June 2003