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A monolayer of physically separated FePt islands has been produced by thermally created mass transport of ultrathin FePt film, whereby formation of a magnetic layer composed of a two-dimensional arrangement of physically separated magnetic grains for decrease of magnetic coupling between the grains can be realized. The monolayer with  orientation was produced on  oriented MgO film. The produced monolayer had a small and uniform grain size and tetragonal L10 structure. Formation of granular film composed of a three-dimensional arrangement of L10-FePt ordered grains with  orientation in MgO film has been achieved by stacking the monolayer of FePt islands with MgO separation layers for high-density perpendicular media.