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W-band CPW RF MEMS circuits on quartz substrates

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2 Author(s)
Rizk, Jad B. ; Electr. Eng. & Comput. Sci. Dept., Univ. of Michigan, Ann Arbor, MI, USA ; Rebeiz, G.M.

This paper presents W-band coplanar waveguide RF microelectromechanical system (MEMS) capacitive shunt switches with very low insertion loss (-0.2 to -0.5 dB) and high-isolation (≤ -30 dB) over the entire W-band frequency range. It is shown that full-wave electromagnetic modeling using Sonnet can predict the performance of RF MEMS switches up to 120 GHz. Also presented are W-band 0°/90° and 0°/180° switched-line phase shifters with very good insertion loss (1.75 dB/bit at 90 GHz) and a wide bandwidth of operation (75-100 GHz). These circuits are the first demonstration of RF MEMS digital-type phase shifters at W-band frequencies and they outperform their solid-state counterparts by a large margin.

Published in:

Microwave Theory and Techniques, IEEE Transactions on  (Volume:51 ,  Issue: 7 )

Date of Publication:

July 2003

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