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Photothermal surface-micromachined actuators

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3 Author(s)
A. D. Oliver ; Sandia Nat. Labs., Albuquerque, NM, USA ; S. R. Vigil ; Y. B. Gianchandani

We report on the optical actuation of surface micromachines. Optical energy is absorbed by the micromachines and converted to heat, which causes differential thermal expansion between different parts of the device and up to 12 μm of displacement. The polysilicon actuators are homogenous and electrically isolated.

Published in:

IEEE Transactions on Electron Devices  (Volume:50 ,  Issue: 4 )