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A 16-stage constant-threshold-voltage type charge pump was designed and fabricated in a standard CMOS 0.18-μm process. With an input clock voltage of less than 1.2 V, the maximum possible output voltage is 14.8 V, with a 65 psec rise time. The charge pump employs metal-insulator-metal (MIM) capacitors in order to minimize the chip area (0.8 × 0.9 mm2). This circuit is intended for generating on-chip actuation voltages for microelectro-mechanical devices and systems (MEMS).