A new method of making precise time-resolved measurements using an unmodified analog network analyzer is described. This technique is most useful in wafer probing unpackaged acoustic devices in production conditions or in characterizing development acoustic devices that are packaged to allow easy physical access to the device and which may, therefore, exhibit high levels of RF feedthrough.
Published in:
Microwave Theory and Techniques, IEEE Transactions on
(Volume:51
,
Issue:
6
)
Date of Publication: June 2003