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Parameters extraction and modeling for planar spiral inductor on Si-SiO2 substrates by DDM for conformal modules

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2 Author(s)
Ji-Xiang Zhao ; Dept. of Electron. Eng., Shanghai Jiao Tong Univ., China ; Jun-Fa Mao

In this paper, the domain decomposition method (DDM) for conformal modules is used to get simple analytic expressions for parameters of planar spiral inductors on Si-SiO2 substrates. The conductor and substrate losses are considered in the expressions. The quality factor of the spiral inductor is computed with a transmission-line mode and compared with previously published experimental results, showing that DDM model is accurate and efficient for modeling an on-chip spiral inductor on Si-SiO2 substrates.

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Microwave Theory and Techniques, IEEE Transactions on  (Volume:51 ,  Issue: 6 )