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Composite microbolometers with tellurium detector elements

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2 Author(s)
Wentworth, S.M. ; Dept. of Electr. Eng., Auburn Univ., AL, USA ; Neikirk, Dean P.

A composite microbolometer has been constructed for possible use as a broadband submillimeter radiation detector. Theory, fabrication, and measurement of these devices are discussed, and a finite element thermal model is introduced. The devices utilize nichrome load elements which can be impedance-matched to a planar antenna. The load elements are thermally coupled to tellurium detectors. Room temperature responsivities of 120 V/W and noise equivalent powers (NEPs) as low as 6.7×10-9 W/√Hz were achieved. Performance appears to be limited by 1/f noise in the Te detector

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Microwave Theory and Techniques, IEEE Transactions on  (Volume:40 ,  Issue: 2 )