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3-D photonic-crystal heterostructures: fabrication and in-line resonator

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6 Author(s)
Kawakami, S. ; NICHe, Tohoku Univ., Sendai, Japan ; Sato, T. ; Miura, K. ; Ohtera, Y.
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A heterostructured photonic-crystal functional chip consisting of a resonator and waveguides is fabricated by a simple "autocloning" process. First, we prepare a substrate with different corrugation patterns by electron beam lithography and dry etching, and Ta/sub 2/O/sub 5/-SiO/sub 2/ multilayers are successively formed upon the substrate. An in-line resonator is fabricated and characterized by fiber-in-fiber-out measurement, and a resonance peak with Q=270 is demonstrated. The future outlook for the technology is also discussed.

Published in:

Photonics Technology Letters, IEEE  (Volume:15 ,  Issue: 6 )