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Beam-steering micromirrors for large optical cross-connects

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19 Author(s)
Aksyuk, V.A. ; Lucent Technol. Bell Labs., Murray Hill, NJ, USA ; Pardo, F. ; Carr, D. ; Greywall, D.
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This paper describes Si-micromachined two-axis beam-steering micromirrors and their performance in 256 × 256- and 1024 × 1024-port large optical cross-connects (OXCs). The high-reflectivity wavelength-independent mirrors are electrostatically actuated; capable of large, continuous, controlled, dc tilt in any direction at moderate actuation voltages; and allow setting times of a few milliseconds. Packaged two-dimensional (2-D) arrays containing independently addressable identical 256 and 1296 mirrors are used to build fully functional bitrate and wavelength-independent single-stage, low-insertion-loss, single-mode fiber OXC fabrics.

Published in:

Lightwave Technology, Journal of  (Volume:21 ,  Issue: 3 )

Date of Publication:

March 2003

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