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Process qualification strategy for advanced embedded non-volatile memory technology - the Philips 0.18 μm embedded flash case

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4 Author(s)
Guoqiao Tao ; Philips Semicond., Nijmegen, Netherlands ; Scarpa, A. ; van Dijk, K. ; Kuper, F.G.

A qualification strategy for advanced embedded non-volatile memory technology has been revealed. This strategy consists of: a thorough understanding of the requirements, extensive use and frequent update of the FMEA (failure mode effect analysis), a qualification plan with excellent coverage of all the risk areas, implementing effective in-line and off-line measures and control, and check-off of all the tests with good results. With such a strategy in place, the Philips 0.18 μm embedded flash technology has been successfully qualified for volume production.

Published in:

Reliability Physics Symposium Proceedings, 2003. 41st Annual. 2003 IEEE International

Date of Conference:

30 March-4 April 2003