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Using simulation tool as a decision-making support system to do PM3 plan in FAB manufacturing

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5 Author(s)

It was a year of economic recession in 2001. In order to reduce the running cost and keep our FAB 's performance at the same level, we executed the specific shut down plan- "PM3". This paper describes a model of PM3 mechanisms using a simulation system and a real time dispatching system. Both of them were developed in MXIC FAB1. It was finally proved that this PM3 plan not only kept good production performance but also save a lot of money in the depression year of 2001.

Published in:

Semiconductor Manufacturing Technology Workshop, 2002

Date of Conference:

10-11 Dec. 2002