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Fabrication of sonic sensors using PZT thin film on Si diaphragm and cantilever

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8 Author(s)
Murakami, S. ; Technol. Res. Inst. of Osaka Prefecture, Japan ; Inoue, K. ; Suzuki, Y. ; Takamatsu, S.
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Micro sonic sensors with a high quality factor (Q-value) using piezoelectric diaphragm and cantilever have been developed for detecting a specific sonic wave which is emitted due to anomalous behavior of rotary machines such as turbines, motors and engines. A piezoelectric PbZr0.52Ti0.48O3 thin film was prepared on a micromachined SOI wafer by sol-gel method. The dependence of the output voltage of the both diaphragm- and cantilever-sensors on the sonic frequency was examined. The both sensors were found to have resonant peaks in the frequency region over 5 kHz with a high Q-value (>100), and the typical sensitivity for the sonic wave at the resonant frequency was estimated to be 10 mV/Pa, which is comparable to that of a commercial bulk ceramics sensor.

Published in:

Applications of Ferroelectrics, 2002. ISAF 2002. Proceedings of the 13th IEEE International Symposium on

Date of Conference:

28 May-1 June 2002