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Surface roughness measurement using laser diffraction pattern obtained by a video camera and photo-sensors

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3 Author(s)
Mouri, A. ; Kinki Univ., Wakayama, Japan ; Aoki, N. ; Inari, T.

Surface roughness can be measured using diffraction pattern formed through reflection on the target surface, In order to realize a practical on-line measurement, the method using a video camera and some photo-sensors to read the intensity distribution of the diffraction pattern is proposed. The deviation between the true distribution and the calculated result is examined in this paper.

Published in:

SICE 2002. Proceedings of the 41st SICE Annual Conference  (Volume:4 )

Date of Conference:

5-7 Aug. 2002