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Development of on-line diagnosis system using intelligent devices for semiconductor equipment

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5 Author(s)
Noguchi, T. ; Syst. Dev. Lab., Hitachi Ltd., Kanagawa, Japan ; Aizono, T. ; Kawano, K. ; Ohashi, M.
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To enable safe, profitable LSI manufacture, semiconductor equipment must be reliable. Equipment failure can cause serious problems, such as an explosion in the chamber, which can stop the fabrication line for a long time. Such problems arise because potential equipment failure cannot be detected in advance. To remedy this, we have developed an on-line detection system that incorporates intelligent devices, such as sensors and actuators, the CPU and communication interface of which enable on-line self-diagnosis.

Published in:

SICE 2002. Proceedings of the 41st SICE Annual Conference  (Volume:5 )

Date of Conference:

5-7 Aug. 2002