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Polymer micro cantilevers for force controlled atomic force microscopy 2 - Fabrication of cantilevers

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5 Author(s)
Kato, Nobuhiro ; Fac. of Biol. Oriented Sci. & Technol., Kinki Univ., Wakayama, Japan ; Choong Sik Park ; Matsumoto, Toshiro ; Kikuta, H.
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The micro cantilever made of entirely plastic material has been developed. The probing tip, cantilever and base are made of same photo plastic. By arranging the geometry of the cantilever, its spring constant and resonant frequency is controlled. The low Q of the polyimide improves the stability of the force controlled atomic force microscope. The fabrication error in cantilever geometry was 1.5%. The estimated resonant frequency has a good agreement with the designed value.

Published in:

SICE 2002. Proceedings of the 41st SICE Annual Conference  (Volume:2 )

Date of Conference:

5-7 Aug. 2002