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Airborne molecular contamination: On-line analytical system for real time contamination control

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7 Author(s)
Illuzzi, F. ; ST Microelectron., Milano, Italy ; Sonego, P. ; Landoni, C. ; Solcia, C.
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The attention of the IC makers for AMC contamination is gaining interest, in particular for its determination with real time techniques. For this purpose a dedicated system has been developed and tested. It allows determining total amines, total acids and multiple specific organic compounds. The data obtained during the test have shown that the concentration of impurities can often be related to production or maintenance processes and that their presence is characteristic for each area. Particular attention must also be paid to monitoring the filter efficiency.

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI

Date of Conference:

31 March-1 April 2003

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