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Simulation-based evaluation of the ramp-up behavior of waferfabs

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4 Author(s)
Sturm, R. ; Dept. Cleanroom Manuf., Fraunhofer Inst. for Manuf. Eng. & Autom., Stuttgart, Germany ; Dorner, J. ; Reddig, K. ; Seidelmann, J.

In this paper we present a simulation study of wafer fab ramp-up scenarios with the simulation software AutoSched AP. A generic factory model (MIMAC 1 from Int. SEMATECH) was adapted to simulate fab ramp-up scenarios. The model was customized to consider time phased modeling capability and time phased reporting. Additionally, an evaluation approach for the comparison of different ramp-up simulation scenarios is presented. This approach helps to evaluate the ramp-up performance with different input parameters. A systematic variation of dispatch rules and lot sizes during ramp-up is shown.

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI

Date of Conference:

31 March-1 April 2003