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Setting performance targets in a 300 mm wafer fabrication facility

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2 Author(s)
Govind, N. ; Dept. of Ind. & Manuf. Eng., Pennsylvania State Univ., USA ; Fronckowiak, D.

Evaluation of fab performance during the ramp-up phase is important since sufficient time should be allowed to develop processes with the designed specifications while productivity has to be maintained at a desired level to meet the ramp schedule. Setting targets for production in such an environment is an important task. Daily production targets help answer the question of whether the fab is performing as well as it should be, given the operating conditions. In this paper, we address the issue of calculating productivity and WIP targets to measure production performance given the fact that the fab is in a ramp mode. Since historical data and reliable benchmarks are not currently available to compare 300 mm fab performance measures, we developed a method for setting production targets. This paper describes the fab performance measures - productivity, work in process (WIP) and cycle time being used to track progress, a methodology to set targets for these measures and the implementation of the methodology using the advanced real time tracking and reporting tools available. The methodology developed is general enough that it can be used to set production targets in fabs which are not in the ramp-up phase.

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI

Date of Conference:

31 March-1 April 2003