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Polymer micro-heat-pipe for InP/InGaAs integrated circuits

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3 Author(s)
Liu, W.Y. ; Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA ; Mohammadi, S. ; Katehi, L.P.B.

This paper reports a polymer-based technology suitable for implementation of micro-heat-pipes for low temperature InP/InGaAs based processes. Many published approaches for implementing heat pipes at micro scale require wafer-to-wafer bonding and sintering. The temperature required for standard wafer-to-wafer bonding or sintering is normally in excess of 500°C and is beyond the thermal budget of many low temperature InP/InGaAs-based processes. This technology enables a heat-pipe to be miniaturized with mainly organic materials at a temperature below 110°C, eliminating the needs for high-temperature wafer-to-wafer bonding and sintering. Measurements have been carried out and are presented to substantiate this presentation.

Published in:

Semiconductor Thermal Measurement and Management Symposium, 2003. Ninteenth Annual IEEE

Date of Conference:

11-13 March 2003