By Topic

Finite element simulation of bulk- and surface acoustic wave (SAW) interaction in SAW devices

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Hofer, M. ; Dept. of Sensor Technol., Erlangen-Nurnberg Univ., Erlangen, Germany ; Finger, N. ; Kovacs, G. ; Schoberl, J.
more authors

Though loss parameters in SAW propagation are used as input for fast analysis models for the simulation of SAW devices, the quantitatively correct description of loss mechanisms is still a challenging task. Therefore, it is important to develop exact measurement and simulation methods which are able to determine these loss parameters accurately. By the use of special boundary conditions, the finite element method (FEM) is able to fulfill these requirements. Regarding the periodic substructure of common SAW devices, we have incorporated periodic boundary conditions (PBCs) in our simulation code. The piezoelectric substrate of SAW devices operating at high frequencies can be modeled as a semi-infinite half space. Therefore, we introduce newly evolved absorbing boundary conditions. They allow us to examine effects emerging from bulk acoustic wave (BAW) radiation (e.g. bulk wave onset frequencies) and assess propagation loss due to leakage and bulk wave conversion accurately.

Published in:

Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE  (Volume:1 )

Date of Conference:

8-11 Oct. 2002