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If the influence of the electrode film thickness is not considered, the propagation loss can suppress the variation quantity by selecting the cut angle of LST-cut at a practical level at the Rayleigh wave level. The problem which should be solved is an electrode film thickness dependency of the leaky surface acoustic wave on LST-cut quartz. IDT is spatially formed as a method of solving this problem, and the method of exciting the leaky surface acoustic wave is examined. The change of the frequency is 20 ppm within the range of the temperature from - 30°C to +110°C.
Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE (Volume:1 )
Date of Conference: 8-11 Oct. 2002