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An assessment of physical and electrical design rule based statistical process monitoring and modeling (PEDR-SPMM): for foundry manufacturing line of multiple-product mixed-run

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11 Author(s)
Doong, K.Y.-Y. ; Taiwan Semicond. Manuf. Corp., Shinchu, Taiwan ; Hsieh, S. ; Lin, S.C. ; Hung, L.J.
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A novel methodology of physical and electrical design rule based statistical process monitoring and modeling (PEDR-SPMM) was proposed. By the aid of principal component analysis, the correlated physical and electrical parameters are decomposed into an independent variable set. The key parameters of multiple products mixed-run could be formulated by the independent variable set, which reduce the modeling complexity, and also provide a way to get a comparison between different technology nodes.

Published in:

Microelectronic Test Structures, 2002. ICMTS 2002. Proceedings of the 2002 International Conference on

Date of Conference:

8-11 April 2002