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A novel methodology of physical and electrical design rule based statistical process monitoring and modeling (PEDR-SPMM) was proposed. By the aid of principal component analysis, the correlated physical and electrical parameters are decomposed into an independent variable set. The key parameters of multiple products mixed-run could be formulated by the independent variable set, which reduce the modeling complexity, and also provide a way to get a comparison between different technology nodes.
Date of Conference: 8-11 April 2002