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Impact of probe configuration and calibration techniques on quality factor determination of on-wafer inductors for GHz applications

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3 Author(s)
Havens, R.J. ; Philips Res. Labs., Eindhoven, Netherlands ; Tiemeijer, L.F. ; Garnbus, L.

We demonstrate that the quality factors measured on on-wafer (spiral) inductor test-structures are largely influenced by the choice between ground-signal and ground-signal-ground probe configuration. In particular when the SOLT network analyzer calibration technique is used in combination with ground-signal probing, the quality factor value can be overestimated significantly.

Published in:

Microelectronic Test Structures, 2002. ICMTS 2002. Proceedings of the 2002 International Conference on

Date of Conference:

8-11 April 2002

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