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This paper reports high-precision motion control at the target position and the offline compensation of the straightness error occurring during the motion of the magnetically levitated stage supported by the linear magnetic bearing. The linear magnetic bearing is composed of electromagnets and sensors in the same module to enable easy maintenance and to reduce the machining error, and the conventional linear quadratic Gaussian control is adopted for the motion control of the stage. The test results show that the stage can compensate the straightness error precisely, so that it is expected that this stage can be applied to high-precision linear motion applications.
Date of Publication: Apr 2003