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3-D stacked thin-film photodetectors for multispectral detection applications

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3 Author(s)
Seo, S.W. ; Microelectron. Res. Center, Georgia Inst. of Technol., Atlanta, GA, USA ; Geddis, D.L. ; Jokerst, N.M.

To demonstrate simultaneous multispectral detection, short and long wavelength thin-film detectors, which are grown and optimized separately, are colocated and heterogeneously integrated in a three-dimensional (3-D) stack onto pads on an Si substrate. Simultaneous two-color detection by each detector in the 3-D stack has been measured and theoretically explored. This heterogeneous integration of two different detectors in a 3-D stack is an interesting physical integration technology for multispectral imaging systems and coarse wavelength-division-multiplexing systems.

Published in:

Photonics Technology Letters, IEEE  (Volume:15 ,  Issue: 4 )