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A 2.5-rad/s2 resolution micro-electro-mechanical system-based rotational accelerometer targeted for hard disk drive (HDD) application is presented. The device is composed by a 0.6-μm BiCMOS electronic interface that implements together with the MEMS sensor one single bit electromechanical ΣΔ conversion loop able to detect capacitive unbalancing as low as 50 aF (50·10-18 F). The produced bitstream is then processed by a digital chain and made available through a standard three-wire digital interface. The device is intended for feedforward compensation of external disturbances acting on computer HDDs to steadily keep the read-write heads on track and to allow greater track densities.
Date of Publication: Mar 2003