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CO2/H2O gas sensor using a tunable Fabry-Perot filter with wide wavelength range

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6 Author(s)
M. Noro ; Yokogawa Electr. Corp., Nagano, Japan ; K. Suzuki ; N. Kishi ; H. Hara
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An electrostatically driven tunable MEMS Fabry-Perot filter (FPF) with wide wavelength range from 2.5 μm to 4.5 μm has been developed for non-dispersive infrared (NDIR) CO2/H2O gas sensors. The electrostatic discharge (ESD) test and the long-term repetition-stability test were carried out for the FPF and no remarkable change of FPF performance was observed in either test. An NDIR system was equipped with the FPF, and the principle of the gas sensing method was confirmed. The resolutions defined by standard deviation are about 13 ppm for CO2 of 2000 ppm and 0.35 g/m3 for H2O Of 22.5 g/m3.

Published in:

Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on

Date of Conference:

19-23 Jan. 2003