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Two axis-of-rotation mirror array using electromagnetic MEMS

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7 Author(s)
J. Bernstein ; Corning IntelliSense Corp., Wilmington, MA, USA ; W. P. Taylor ; J. Brazzle ; G. Kirkos
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This paper presents an overview of Coming IntelliSense's 3D electromagnetic MEMS mirror technology for use in optical switching applications. This work presents for the first time a dense array of mirrors actuated through large angles at low voltage and low current. Multiple coils on the backs of the mirrors interact with permanent magnetic fields to provide actuation. Unlike previous electromagnetic 2-axis mirrors, a novel and simple arrangement of coils and magnets provides true 2-axis orthogonal actuation, as well as an order of magnitude increase in tilt (°/mA). Actuation is linear vs. drive current on both axes, and displays negligible charging and drift. These mirrors have achieved greater than 10 degrees mechanical rotation per mA in each axis, a 40x increase over previously reported work. The mirror rotation angle is hysteresis free to less than 0.01 degrees, and is actuated at about 1 volt.

Published in:

Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on

Date of Conference:

19-23 Jan. 2003