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Micromachined arrayed dip pen nanolithography probes for sub-100 nm direct chemistry patterning

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9 Author(s)
D. Bullen ; Micro Actuators, Sensors, & Syst. Group, Illinois Univ., Urbana, IL, USA ; Xuefeng Wang ; Jun Zou ; Seunghun Hong
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We report the development of micromachined passive and active probe arrays for parallel dip pen nanolithography (DPN). DPN is a soft lithography method that allows direct, mask-less deposition of chemicals onto substrates with sub 100-nm resolution. An active DPN probe with thermal bimetallic actuation has been developed and tested. Lithographic results and an analytical tool for optimizing active probe designs with respect to a number of performance criteria are also demonstrated.

Published in:

Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on

Date of Conference:

19-23 Jan. 2003