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The paper investigates the characteristics of microwave transmission in coplanar waveguides (CPWs) fabricated on various silicon carbide substrates. Propagation constant and characteristic impedance measurements were performed at frequencies from 0.1 to 10 GHz. Different propagation modes are observed as a function of frequency and substrate resistivity. In the case of the low-loss structure, a quasi-TEM equivalent circuit model was developed from the available process parameters, taking into account the effects of electromagnetic fields in CPW structures.