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Adaptive control for the conventional mode of operation of MEMS gyroscopes

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2 Author(s)
Sungsu Park ; PATH, Univ. of California, Berkeley, CA, USA ; R. Horowitz

This paper presents adaptive add-on control algorithms for the conventional mode of operation of MEMS z-axis gyroscopes. This scheme is realized by adding an outer loop to a conventional force-balancing scheme that includes a parameter estimation algorithm. The parameter adaptation algorithm estimates the angular rate, identifies and compensates the quadrature error, and may permit on-line automatic mode tuning. The convergence and resolution analysis show that the proposed adaptive add-on control scheme prevents the angular rate estimate from being contaminated by the quadrature error, while keeping ideal resolution performance of a conventional force-balancing scheme.

Published in:

Journal of Microelectromechanical Systems  (Volume:12 ,  Issue: 1 )