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Development of an end-point detector for parylene deposition process

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5 Author(s)
Wongso Sutomo ; Nanotechnology Lab., Univ. of Illinois, Champaign, IL, USA ; Wang, Xuefeng ; Bullen, David ; Braden, S.K.
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Parylene is an emerging material for MEMS. It is an organic material that is grown by using the chemical vapor deposition method at room temperature. The deposition thickness is commonly controlled by the amount of solid-phase dimer loaded in a sublimation chamber. In a conventional deposition machine, the end point of the process is designated by the moment the dimer is exhausted. However, this end-of-process criterion does not offer precise, repeatable control of film thickness. We present the results of the development of an in situ end-point detector for a Parylene chemical vapor deposition process. The detector is based on the thermal transfer principle and can be implemented on commercial parylene deposition systems with minimal system modification. Such a sensor enables a user to stop the deposition when a targeted thickness is reached. The end point detector is very simple to implement on existing parylene deposition systems. A series of such sensors with different target deposition thickness would allow extraction of the actual deposition rate within a deposition run.

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Microelectromechanical Systems, Journal of  (Volume:12 ,  Issue: 1 )