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Measurement of longitudinal piezoelectric coefficient of thin films by a laser-scanning vibrometer

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2 Author(s)
Kui Yao ; Inst. of Mater. Res. & Eng., Singapore, Singapore ; F. E. H. Tay

A laser scanning vibrometer (LSV) was used for the first time to measure the piezoelectric coefficient of ferroelectric thin films based on the converse piezoelectric effect. The significant advantages of the use of the LSV or this purpose were demonstrated. Several key points were discussed in order to achieve reliable and accurate results.

Published in:

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control  (Volume:50 ,  Issue: 2 )