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The genetic algorithm (GA) with parameter confinement has been introduced into the extraction of model parameters for RF on-chip inductors. The details of applying the GA in extracting the model's parameters are discussed. For a set of inductors, the meaningfulness of extracted parameters is considered in the procedure of extraction. The S-parameter, inductance, and Q value can be set as the fitting targets simultaneously in this study. The values of model parameters are extracted by a fully automatic programmed GA procedure, which show excellent quality of fit when compared with the measured data.