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Freestanding carbon nanotube bridge grown by hot-filament chemical vapor deposition

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3 Author(s)
Miyashita, H. ; Dept. of Mechatronics & Precision Eng., Tohoku Univ., Sendai, Japan ; Ono, T. ; Esashi, M.

We had reported that the growth of carbon nanotubes (CNT) was enhanced by electric field with hot-filament chemical vapor deposition (HF-CVD), and SPM probe with an individual CNT was successfully fabricated. This paper describes the growth technique of a freestanding CNT between two opposed silicon electrodes with the electric field enhanced method.

Published in:

Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International

Date of Conference:

6-8 Nov. 2002