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This paper presents the construction and a new complex model of the fabricated silicon dew point hygrometer. The model describes the behavior of water vapor contained in the measured gas (saturated vapor partial pressure, super cooled water phenomenon), water mass transport (condensation and evaporation processes), heat transport across measurement head, silicon dew detector, and regulator characteristics. The model was created in the SIMULINK environment. Finally, a comparison of measured data and model responses is discussed.