Scheduled System Maintenance on May 29th, 2015:
IEEE Xplore will be upgraded between 11:00 AM and 10:00 PM EDT. During this time there may be intermittent impact on performance. We apologize for any inconvenience.
By Topic

Fully electronic DNA detection on a CMOS chip: device and process issues

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

The purchase and pricing options are temporarily unavailable. Please try again later.
15 Author(s)
Hofmann, F. ; Corporate Res., Infineon Technol., Munich, Germany ; Frey, A. ; Holzapfl, B. ; Schienle, M.
more authors

A sensor array for fully electronic detection of DNA molecules is fabricated using an extended CMOS process. A gold deposition process module and a compartment are integrated in the CMOS backend process. DNA detection is performed using a redox-cycling based electrochemical technique. Process and device issues and the impact of different processing variants on the circuit performance of the chip are discussed in detail. The result of biological experiments on chips with 128 positions are shown to prove the success of the chosen approach.

Published in:

Electron Devices Meeting, 2002. IEDM '02. International

Date of Conference:

8-11 Dec. 2002