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Thermal distribution during single destructive electrostatic discharge (ESD) events is investigated in smart power ESD protection devices using a novel two-dimensional holographic interferometry technique. The hot spot dynamics and position of destructive current filaments is correlated with the thermal distribution under the non-destructive conditions and with the failure analysis results.
Electron Devices Meeting, 2002. IEDM '02. International
Date of Conference: 8-11 Dec. 2002