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Thermal distribution during destructive pulses in ESD protection devices using a single-shot, two-dimensional interferometric method

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9 Author(s)
Pogany, D. ; Inst. for Solid State Electron., Vienna Univ. of Technol., Austria ; Bychikhin, S. ; Kuzmik, J. ; Dubec, V.
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Thermal distribution during single destructive electrostatic discharge (ESD) events is investigated in smart power ESD protection devices using a novel two-dimensional holographic interferometry technique. The hot spot dynamics and position of destructive current filaments is correlated with the thermal distribution under the non-destructive conditions and with the failure analysis results.

Published in:

Electron Devices Meeting, 2002. IEDM '02. International

Date of Conference:

8-11 Dec. 2002