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Using simulation to understand capacity constraints and improve efficiency on process tools

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3 Author(s)
Aybar, M. ; DMOS 5 Wafer Fab, Texas Instrum. Inc., Dallas, TX, USA ; Potti, K. ; LeBaron, T.

Finding hidden capacity and maximizing cluster tool throughput is a common goal for today's semiconductor manufacturers. This presentation discusses a flexible and accurate simulation program capable of modeling a wide range of semiconductor process tools. The simulation program provides visibility and understanding into the internal dependencies and interactions of each process tool. This information provides a solid base from which sound decisions can be made. Simulation results from two case studies will be presented. The real-world capacity improvements, cycle time reductions and cost savings are presented.

Published in:

Simulation Conference, 2002. Proceedings of the Winter  (Volume:2 )

Date of Conference:

8-11 Dec. 2002