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Dynamic response of thermally tunable micromachined optical filter with low tuning voltage

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5 Author(s)
Amano, T. ; Microsystem Res. Center, Tokyo Inst. of Technol., Yokohama, Japan ; Hino, T. ; Koyama, F. ; Arai, A.
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We present some tuning characteristics of a GaAlAs/GaAs micromachined tunable filter with a thermal strain control layer and heating element integrated on a top surface. We present the design of micromachined filters for a wide tuning range and for fast wavelength tuning. Experimentally, we demonstrate the fast tuning response with rise time and fall time of below 100 μs.

Published in:
Lasers and Electro-Optics Society, 2002. LEOS 2002. The 15th Annual Meeting of the IEEE  (Volume:2 )

Date of Conference: 10-14 Nov. 2002

Page(s):
829 - 830 vol.2
ISSN :
1092-8081
Print ISBN:
0-7803-7500-9
INSPEC Accession Number:
7678934
Digital Object Identifier :
10.1109/LEOS.2002.1159564
Product Type:
Conference Publications

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