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We present some tuning characteristics of a GaAlAs/GaAs micromachined tunable filter with a thermal strain control layer and heating element integrated on a top surface. We present the design of micromachined filters for a wide tuning range and for fast wavelength tuning. Experimentally, we demonstrate the fast tuning response with rise time and fall time of below 100 μs.
Lasers and Electro-Optics Society, 2002. LEOS 2002. The 15th Annual Meeting of the IEEE (Volume:2 )
Date of Conference: 10-14 Nov. 2002