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Buried-channel CCD imaging arrays with tin-oxide transparent gates

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7 Author(s)
McCann, D. ; Westinghouse Electric Corp., Baltimore, MD, USA ; Turley, A. ; Hall, J. ; Walker, J.
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The fabrication and performance of CCD imaging arrays with transparent gate tin-oxide electrodes will be presented. Imagers described will include 1 × 256 linear, 100 × 100 area and 29 × 9 TDI sensors.

Published in:

Solid-State Circuits Conference. Digest of Technical Papers. 1978 IEEE International  (Volume:XXI )

Date of Conference:

15-17 Feb. 1978